Advanced Etch Technology for Nanopatterning II
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About the Book
Advanced Etch Technology for Nanopatterning II Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Book Details
ISBN-13: 9780819494672
EAN: 9780819494672
Binding: Paperback
Country Of Origin: United States
Illustrations: Illustrations (black and white, and colour)
Pagination: 277 pages, Illustrations (black and white, and colour)
Series Title: Proceedings of SPIE
UK Availability: GXC
ISBN-10: 0819494674
Publisher: Spie Press
Bood Data Readership Text: Tertiary Education (US: College)
Gardner Classification Code: K00
No of Pages: 277
Returnable: Y
Star Rating: 0
Year Of Publication: 2013