EUV Lithography
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About the Book
EUV Lithography
Book Details
ISBN-13: 9780819469649
EAN: 9780819469649
Binding: Hardback
Country Of Origin: United States
Height: 255 mm
No of Pages: 800
Returnable: Y
Spine Width: 43 mm
UK Availability: GXC
Year Of Publication: 2009
ISBN-10: 0819469645
Publisher: Spie Press
Bood Data Readership Text: Professional & Vocational
Gardner Classification Code: K00
Illustrations: Illustrations
Pagination: 800 pages, Illustrations
Series Title: SPIE Press Monograph
Star Rating: 1
Width: 183 mm
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