Metrology, Inspection, and Process Control for Microlithography
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Book Details
ISBN-13: 9780819431516
Publisher: Spie Press
Publisher Imprint: Spie Press
Height: 280 mm
Language: English
Spine Width: 59.94 mm
Type: Professional & Vocational
ISBN-10: 0819431516
Publisher Date: 30 Jun 1999
Binding: Hardback
Illustrations: illustrations
No of Pages: 1052
Type: Postgraduate, Research & Scholarly
Width: 214.12 mm
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