Metrology, Inspection and Process Control for Microlithography XVII
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Book Details
ISBN-13: 9780819448439
Publisher: Spie Press
Bood Data Readership Text: Technical / Manuals
Gardner Classification Code: K00
No of Pages: 1296
Returnable: Y
Type: Undergraduate
Type: Professional & Vocational
Year Of Publication: 2003
ISBN-10: 0819448435
Binding: Paperback
Edition: illustrated ed
Illustrations: illustrations
Pagination: 1296 pages, illustrations
Series Title: Proceedings of SPIE
Type: Postgraduate, Research & Scholarly
UK Availability: GXC
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