Metrology, Inspection, and Process Control for Microlithography XVIII
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Book Details
ISBN-13: 9780819452887
Publisher: Spie Press
Publisher Imprint: Spie Press
Edition: illustrated ed
Illustrations: illustrations
No of Pages: 1460
Type: Professional & Vocational
ISBN-10: 0819452882
Publisher Date: 30 Jun 2004
Binding: Paperback
Height: 274.07 mm
Language: English
Spine Width: 80.01 mm
Width: 215.9 mm
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