Nanolithography and Patterning Techniques in Microelectronics
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About the Book
Nanolithography and Patterning Techniques in Microelectronics
Book Details
ISBN-13: 9780849334474
EAN: 9780849334474
Publisher Date: 11 Oct 2005
Dewey: 621.381
Illustration: Y
No of Pages: 409
Series Title: English
Width: 154 mm
ISBN-10: 0849334470
Publisher: CRC Press
Binding: Hardcover
Height: 238 mm
Language: English
PrintOnDemand: N
Spine Width: 27 mm
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