Nanolithography and Patterning Techniques in Microelectronics
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About the Book
This book concentrates on state-of-the-art nanolithographic methods with a particular emphasis on polymer research.
Book Details
ISBN-13: 9781855739314
EAN:
Publisher Date: 14 Oct 2005
Dewey: 621.381
Height: 236 mm
Illustrations: Illustrations
LCCN: 2006365086
No of Pages: 424
Series Title: English
Type: Professional & Vocational
ISBN-10: 1855739313
Publisher: Woodhead Publishing
Binding: Hardcover
Edition: illustrated ed
Illustration: Y
Language: English
MediaMail: Y
PrintOnDemand: N
Spine Width: 37 mm
Width: 160 mm
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