EUV Sources for Lithography
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About the Book
EUV Sources for Lithography
Book Details
ISBN-13: 9780819458452
Publisher: Spie Press
Binding: Hardback
Book Type: English
Depth: 51
Height: 262 mm
Language: English
No of Pages: 900
Returnable: Y
Spine Width: 57 mm
Type: Professional & Vocational
Width: 180 mm
ISBN-10: 0819458457
Acedemic Level: English
Bood Data Readership Text: Postgraduate, Research & Scholarly
Continuations: English
Gardner Classification Code: K00
Illustrations: Illustrations
LCCN: 2005025505
Pagination: 900 pages, Illustrations
Series Title: SPIE Press Monograph
Type: Postgraduate, Research & Scholarly
UK Availability: GXC
Year Of Publication: 2005
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