Advanced Etch Technology for Nanopatterning IV
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About the Book
Advanced Etch Technology for Nanopatterning IV Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Book Details
ISBN-13: 9781628415308
EAN: 9781628415308
Binding: Paperback
Country Of Origin: United States
Height: 229 mm
Pagination: 277 pages
Series Title: Proceedings of SPIE
UK Availability: GXC
Year Of Publication: 2015
ISBN-10: 1628415304
Publisher: Spie Press
Bood Data Readership Text: Postgraduate, Research & Scholarly
Gardner Classification Code: ZZZ
No of Pages: 277
Returnable: Y
Star Rating: 0
Width: 152 mm
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