Metrology, Inspection, and Process Control for Microlithography XXV
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About the Book
Metrology, Inspection, and Process Control for Microlithography XXV
Book Details
ISBN-13: 9780819485304
EAN: 9780819485304
Binding: Paperback
Country Of Origin: United States
Height: 229 mm
No of Pages: 854
Returnable: Y
UK Availability: GXC
Year Of Publication: 2011
ISBN-10: 0819485306
Publisher: Spie Press
Bood Data Readership Text: General (US: Trade)
Gardner Classification Code: U01
Illustrations: illustrations
Pagination: 854 pages, illustrations
Star Rating: 0
Width: 152 mm
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