Metrology, Inspection, and Process Control for Microlithography XII
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About the Book
Metrology, Inspection, and Process Control for Microlithography XII
Book Details
ISBN-13: 9780819427779
EAN: 9780819427779
Binding: Hardback
Country Of Origin: United States
Illustrations: illustrations port.
Pagination: 759 pages, illustrations port.
Series Title: SPIE proceedings series
UK Availability: GXC
ISBN-10: 0819427772
Publisher: Spie Press
Bood Data Readership Text: Undergraduate
Gardner Classification Code: K00
No of Pages: 759
Returnable: Y
Star Rating: 0
Year Of Publication: 1998
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