Metrology, Inspection, and Process Control for Microlithography XXII
21%
OFF
Available
 
Book Details
ISBN-13: 9780819471079
Publisher: Spie Press
Bood Data Readership Text: Professional & Vocational
Illustrations: Illustrations
Pagination: 1344 pages, Illustrations
Series Title: Proceedings of SPIE
UK Availability: GXC
ISBN-10: 0819471070
Binding: Paperback
Gardner Classification Code: K00
No of Pages: 1344
Returnable: Y
Type: Professional & Vocational
Year Of Publication: 2008