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Metrology, Inspection, and Process Control for Microlithography XIX
(Paperback)
By:
Richard M. Silver
(Author)
| Publisher:
Spie Press
R
9,829
Available
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About the Book
Metrology, Inspection, and Process Control for Microlithography XIX
Book Details
ISBN-13:
9780819457325
EAN:
9780819457325
Binding:
Paperback
Country Of Origin:
United States
Illustrations:
illustrations
Pagination:
1474 pages, illustrations
Series Title:
Proceedings of SPIE
UK Availability:
GXC
ISBN-10:
0819457329
Publisher:
Spie Press
Bood Data Readership Text:
Professional & Vocational
Gardner Classification Code:
K00
No of Pages:
1474
Returnable:
Y
Star Rating:
0
Year Of Publication:
2005
Related Categories
Biographies & Memoirs
>
Biography: general
>
Biography: arts & entertainment
Technology & Engineering
>
Other technologies & applied sciences
>
Applied optics
>
Fibre optics
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